Beilstein J. Nanotechnol.2023,14, 175–189, doi:10.3762/bjnano.14.18
Ryo Izumi Masato Miyazaki Yan Jun Li Yasuhiro Sugawara Department of Applied Physics, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan 10.3762/bjnano.14.18 Abstract The recently proposed high–lowKelvinprobeforcemicroscopy (KPFM) enables evaluation
surfaces to confirm the dependence of the electrostatic force on the frequency of the AC bias voltage and obtain the interface state density.
Keywords: high–lowKelvinprobeforcemicroscopy; high–low Kelvin probe force spectroscopy; interface state density; Kelvin probe force microscopy; Kelvin probe
–lowKelvinprobeforcemicroscopy (high–low KPFM) as a technique to solve the above problem [20][21]. High–low KPFM is a method for measuring the magnitude and direction of band bending due to interface states by applying low-frequency and high-frequency AC bias voltages between the tip and the sample
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Figure 1:
(a) Schematic of the metal tip–gap–semiconductor sample. (b) Energy band diagram of the metal–gap–s...